Hardcoats for flat panel display substrates
US6083313A · kind A · utility
106Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1999 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Jul 27, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a unique hard coating that provides the necessary characteristics for flat panel display plastic substrates because the coating is amorphous and is comprised of C, H, Si and O. The coating of the present invention is hard, optically transparent, scratch and abrasion resistant and hydrophobic. It is deposited by a low density, low temperature plasma enhanced chemical vapor deposition (PECVD) process and exhibits excellent barrier protection and reduced permeability to moisture, oxygen, helium and other vapors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.