Method for reacting pyrophoric gas
US6084148A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 1993 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Aug 19, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00768
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for reacting a pyrophoric gas is disclosed. In the method, a stream of spent process gas from, for example, a chemical vapor deposition process containing silane is mixed with the oxidizing gas flow such as air. The combined flow is sufficiently turbulent to provide for a controlled reaction of the silane. The method may be used for a wide range of pyrophoric gas flow rates, such that the risk of explosion is eliminated. The reaction between silane and oxygen occurs spontaneously. Because the reaction proceeds spontaneously, no ignitor is necessary. Additionally, the method requires no external fuel source and, due to the turbulence proceeds even in conditions were no flame is generated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.