Shuntable magnetic mask support apparatus
US6084494A · kind A · utility
11Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1997 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Jan 23, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A mask support device including two communicating elements, a first element having ferromagnetic shunts, and a second element containing permanent magnets, and wherein the elements are rotatable about a central axis and assume fixed positions in the rotation. The mask support device in one position attracts a ferromagnetic metal mask. In a second position, owing to the shunt redirecting the magnetic field, releases the metal mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.