Device for optically measuring an object using a laser interferometer
US6084672A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 15, 1998 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Sep 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/65
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device is provided for optical measurement of an object, in particular for path and/or vibration measurements, using a laser interferometer, wherein a measuring beam is input into the beam path of a microscope. The device has a mechanism for shifting the measuring beam in an approximately parallel manner. The input of the measuring beam is accomplished via a camera connection of the microscope. The shifting device causes a shift of the impact point of the measuring beam on the measurement object, and the measuring beam reflected back or scattered from the measurement object is decoupled via the camera connection from the beam path of the microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.