Method of manufacturing thin metal membranes
US6086729A · kind A · utility
18Cited by
12References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1998 |
| Grant date | Jul 11, 2000 |
| Priority date | — |
| Expiry date | Oct 20, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Method for manufacturing a composite membrane structure comprising a thin metal membrane, for example of silver, palladium or palladium alloys, for use in selective diffusion of gasses. The metal material for the membrane is applied by sputtering as a coating on a base member having a low surface roughness, to a desired thickness of the resulting coating. The coating is pulled off from the base member so as to form the metal membrane, and the metal membrane is placed on a supporting substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.