Corrugated MEMS heater structure
US6087638A · kind A · utility
222Cited by
13References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 10, 1998 |
| Grant date | Jul 11, 2000 |
| Priority date | — |
| Expiry date | Jul 10, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2214/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A thermal actuator comprising a first conductive material encased in a second non-conductive expansive material wherein said first conductive material is constructed in the form of a corrugated heater element so as to increase the rate of thermal transfer to said second non-conductive expansive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.