Position control system for use with micromechanical actuators
US6087743A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1998 |
| Grant date | Jul 11, 2000 |
| Priority date | — |
| Expiry date | Sep 10, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K33/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.