Process for large area deposition of diamond-like carbon films
US6090456A · kind A · utility
9Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 3, 1997 |
| Grant date | Jul 18, 2000 |
| Priority date | — |
| Expiry date | May 3, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S427/104
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A new method for ion beam deposition of diamond-like carbon coatings onto a variety of substrates is described. A high power, radio frequency excited-inductively coupled ion gun directs a beam of carbon and hydrogen ions at a substrate inside an ultra vacuum deposition chamber. A four axis scanner is used for coating large and nonplaner substrates. A quadrupole mass spectrometer is mounted inside the deposition chamber for real time monitoring of ion composition. The disclosed method is particularly effective for coating zinc sulfide and zinc selenide infrared windows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.