Patent · US Expired

Reverse blocking IGBT

US6091086A · kind A · utility

19Cited by
32References
14Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 6, 1997
Grant dateJul 18, 2000
Priority date
Expiry dateJun 6, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/106

Abstract

A method of forming a power integrated circuit device (100) including a semiconductor layer of first conductivity type. The semiconductor layer includes a front-side surface (103), a backside surface (116), and a scribe region (117). The semiconductor layer further including a plurality of active cells on the front-side surface (103). The present method includes forming a backside layer (116) of second conductivity type overlying the backside surface, and forming a continuous diffusion region (117) of the second conductivity type through the semiconductor layer to connect the scribe region to the backside layer (116).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.