Electro-actuated microlens assemblies
US6091537A · kind A · utility
89Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 1998 |
| Grant date | Jul 18, 2000 |
| Priority date | — |
| Expiry date | Dec 11, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18388
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-machined movable microlens assembly is formed on undoped or pure a semiconductor substrate. The movable microlens assemblies are to be actuated using force generators which cause various mechanical degrees of freedom depending upon the type of stage suspension and actuation used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.