Wafer gripping device adapted to swivel wafers taken from a horizontal position in a storage container
US6092971A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1997 |
| Grant date | Jul 25, 2000 |
| Priority date | — |
| Expiry date | Jul 7, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
For removing and transporting several spaced, parallel wafers stored in a container, a gripping device is provided. The gripping device has a holding rake and several gripping heads which can be rotated with respect to the holding rake. In one swivel position, the gripping heads are moved through between the wafers and then swivelled into another swivel position. In this latter position, the gripping heads are brought to a stop against the edges of the wafers movement of the gripping device, and then the opposite edges of the wafer disks are brought to stop against the counterholder by displacement of the counterholder. All wafers contained in the container are thus simultaneously securely held and can be displaced out of the container. In order to then swivel the wafers, the holding rake which has slots for receiving the wafer edges is also stopped at the wafer edges, and the counterholder is then pushed back. The wafers are therefore securely swivelled. In the swivelled position, the vertically standing wafers are supplied to a processing carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.