Method for fabricating adhesion-resistant micromachined devices
US6096149A · kind A · utility
32Cited by
3References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 1997 |
| Grant date | Aug 1, 2000 |
| Priority date | — |
| Expiry date | Apr 21, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for fabricating an adhesion-resistant microelectromechanical device is disclosed wherein amorphous hydrogenated carbon is used as a coating or structural material to prevent adhesive failures during the formation and operation of a microelectromechanical device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.