System for detecting base contaminants in air
US6096267A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1997 |
| Grant date | Aug 1, 2000 |
| Priority date | — |
| Expiry date | Feb 28, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/173845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for detection of base contamination at low concentrations in air comprises a detector that provides a single reading that is stoichiometrically related to the aggregate proton-bonding characteristic of various base contaminants present in the air. The system can operate as a "total amine detector" for air-borne amines, and in important implementations is employed in semiconductor manufacturing, e.g. in respect of incoming or exhaust air from a cleanroom or in respect of the stepper or coat and develop track of a photolithographic process. The system comprises a converter for converting all amines present in the air to a common detectable compound detected by the detector. In various implementations additional features are shown. The converter is located near a sample region of a process and the detector is remotely located with sample lines extending between converter and detector to conduct a sample flow. Filters provide air free of amine contaminants to various stages of a process. The air from the outlet of the filters is employed to provide zero air for calibration of the converter and detector. Continual, automated recalibration is shown. Air from the intermediate por…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.