Slippable roller conveyor for a cleanroom
US6098786A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 1998 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Oct 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6773
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A slippable roller conveyor for a class one cleanroom. In one embodiment, the present invention includes a slippable roller conveyor with a surface path for conveying objects that is largely open so as to facilitate the downward flow of air from a clean air source above the conveyor to an evacuator below the conveyor. The slippable rollers include guiding flanges to resist lateral movement of the object being conveyed. The conveyor includes skirts with substantially smooth surfaces and minimal horizontal surfaces that assist in discouraging lateral flow of the clean air. Also, one embodiment of the invention includes a powered transfer mechanism for transferring objects from one conveyor path to another conveyor path. The transfer mechanism is enclosed and evacuated so as to prevent the escape of particulate matter into the cleanroom. The driving mechanism, motor, and electrical components are also contained in evacuated enclosures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.