Chemical delivery systems and methods of delivery
US6098843A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Dec 31, 1998 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Dec 31, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/14
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.