Incrementally continuous laser cleaving process
US6098862A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 1998 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | May 18, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T225/325
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An incrementally continuous cleaving system allows for sequential flow of "material-to-be-cleaved" through a cleaving apparatus. In particular, a continuous feed tape membrane is used to support sequentially loaded optical bars (or, perhaps, wafers) that are then transported into a cleaving apparatus. The tape is advanced in small increments so that individual cleaving operations are performed at each scribe mark location on the top surface of the optical material. A vacuum pen (assisted by a detach pin) is then used to remove the cleaved section from the cleaving system. A conventional pick-and-place device may be used in the first instance to continuously load the bars (or wafers) onto the tape membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.