Vertical semiconductor wafer carrier with slats
US6099645A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 1999 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Jul 9, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for holding a plurality of semiconductor wafers during heat treatment of the wafers in a furnace, which apparatus comprises a plurality of support members or rails extending essentially vertically between a top and bottom plate. At least two of the support members are located toward the front of the carrier where the wafers are inserted, and at least one support member is located toward the back of the carrier. A first plurality of slats is attached to one of the front support members and to a back support member such that the space between the top surface of one slat and the bottom surface of the next higher adjacent slat forms a slot for receiving a portion of a semiconductor wafer. A second plurality of slats is attached to another front support member and to a back support member to form corresponding slots on another side of the carrier for receiving another portion of a semiconductor wafer. Preferably, each slat contains at least one raised structure which is used to support the underside of a semiconductor wafer. Such an apparatus having multiple slats interconnected with the vertical support members provides a strong carrier for uniformly supporting larger wafe…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.