Recessed etch RF micro-electro-mechanical switch
US6100477A · kind A · utility
136Cited by
6References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 1998 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Jul 17, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H59/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.