Silicon substrate having a recess for receiving an element
US6100576A · kind A · utility
3Cited by
6References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 27, 1997 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Oct 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3801
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In silicon substrate having a recess for receiving an element, at least one holding element, integral with the substrate, extends, at least partly, over the recess to hold an element received in the recess in place.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.