Apparatus for conveying spherical articles between atmospheres
US6102629A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 1998 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Jun 17, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67721
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a device for conveying spherical articles at high speed between sequential processes having different protective atmospheres, where the leakage of the atmospheres, which must be converted between the sequential processes, is prevented. The device includes a structure incorporating a rotary relay having a plurality of spherical-article accommodating chambers formed at predetermined intervals, a support container closely mounted on the rotary relay, and having a spherical-article receiving passage and a discharge passage. An atmosphere discharge pipe communicates with the spherical-article accommodating chambers of the rotary relay, and an atmosphere supply pipe is disposed adjacent to the spherical-article discharge portion of the rotary relay and communicates with the accommodating chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.