Mitigation of electrostatic discharges during carbon dioxide cleaning
US6103016A · kind A · utility
2Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 28, 1995 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Nov 28, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/1121
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Electrostatic discharges that occur during solid CO.sub.2 cleaning of a substrate (10) can be virtually eliminated by chilling the substrate so that moisture in the atmosphere, in the form of water droplets(30), condense on the substrate surface (14), thereby forming a continuous film of water (28). The water in the film (28) reacts with the solid CO.sub.2 (24) to form carbonic acid that dissociates into free ions that neutralize the charge on the solid CO.sub.2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.