Piezoelectric thin-film device, process for manufacturing the same, and ink-jet recording head using the same
US6103072A · kind A · utility
30Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1998 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Feb 24, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric thin-film device includes: a substrate; and a piezoelectric thin film formed on the substrate, wherein a thickness of the piezoelectric thin film is 1 to 10 .mu.m, a crystal grain size of the piezoelectric thin film is 0.05 to 1 .mu.m, and a surface roughness (Rmax) of the piezoelectric thin film is no more than 1 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.