Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film
US6103305A · kind A · utility
29Cited by
5References
19Claims
0Family size
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Key dates
| Filing date | Nov 23, 1999 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Nov 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S427/104
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650.degree. C., a much lower value than is expected from the annealing behavior of other materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.