Patent · US Expired

Interface apparatus for automatic test equipment

US6104202A · kind A · utility

31Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 29, 1997
Grant dateAug 15, 2000
Priority date—
Expiry dateSep 29, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T403/32
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An interface between a test head portion of automatic test equipment and handling device such as a prober. The interface employs preloaded kinematic couplings between the test head and handling device and between the probe card and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provide seperate mechanical and electrical loops such that mechanical position is not dependant on the electrical structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.