Free-diaphragm pump
US6106246A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 1998 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Oct 5, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B2201/0605
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A pump for ultra-pure fluids, such as hot, de-ionized water, processing acids, and the like, such as those used in the semiconductor processing industries, is designed to operate at greater than 10 and often 30 or 50 million cycles without failure, and to be failclean. A diaphragm pump maintains a free diaphragm, supported in a contoured chamber for driving and being driven by a piston, able to move radially, rather than absorbing misalignment or distortions. A self-energizing, self-centering, trapezoidal seal captures a constant-thickness diaphragm between a head and body forming the chamber of the pump, separating a body portion and a head portion. An oriented, calendered, multi-layered chlorofluorocarbon diaphragm may be the same material chemically as the body, head, or both. Non-reactive pilots control an operating (motive) fluid, detecting the end-of-stroke whether near the head or near the body. An integrated base controller for the operating fluid supports the apparatus, has a quick exhaust for dumping external-controller air overboard after use, and a bias disk to provide precise, digital, spool positioning within an operational range of pressure differentials. The heads m…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.