Filtering photoresist-containing liquid
US6106722A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1997 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Aug 12, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F1/42
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of filtering feed liquid including a photoresist substance comprises removing cations from the feed liquid using an ion exchange material. A fine particle filter filters the feed liquid and, in particular, removes dissolved solids from the feed liquid. The material is regenerated with a solution, e.g., a brine solution, which has a pH effective to avoid fouling of at least one of the filter and the ion exchange material. Another embodiment concerns a filtration apparatus including an ion exchange device containing the ion exchange material. A fine particle filtration device removes dissolved solids from the liquid. A device for regenerating the material includes a supply of the regenerating solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.