Method for making a five square vertical DRAM cell

US6107133A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Toshiharu Furukawa · South Burlington, US
• Mark C. Hakey · Saint Albans, US
• David V. Horak · South Burlington, US
• William H. Ma · Wappingers Falls, US
• Jack A. Mandelman · Stormville, US

Key dates

• Filing date: May 28, 1998
• Grant date: Aug 22, 2000
• Expiry date: May 28, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/0385

Abstract

Five square dynamic random access memory (DRAM) cell is prepared with a vertical transfer device with long channel length. In this construction, channel length is not affected by cell size scaling requirements.