Method and apparatus for directing ions and other charged particles generated at near atmospheric pressures into a region under vacuum
US6107628A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1998 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Jun 3, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/066
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for focusing dispersed charged particles. More specifically, a series of elements within a region maintained at a pressure between 10.sup.-1 millibar and 1 bar, each having successively larger apertures forming an ion funnel, wherein RF voltages are applied to the elements so that the RF voltage on any element has phase, amplitude and frequency necessary to define a confinement zone for charged particles of appropriate charge and mass in the interior of the ion funnel, wherein the confinement zone has an acceptance region and an emmitance region and where the acceptance region area is larger than the emmitance region area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.