Patent · US Expired

Isolated multi-chip devices

US6107674A · kind A · utility

28Cited by
22References
24Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 5, 1993
Grant dateAug 22, 2000
Priority date
Expiry dateMay 5, 2013

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31681
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device structure in which a power semiconductor device is used as the substrate for the structure. Initially, a first metallization layer is formed on the power semiconductor device. Then, a dielectric passivation layer is formed over the first metallization layer, the dielectric passivation layer having apertures through which the first metallization layer may be accessed. A polymer passivation layer is then formed on the dielectric passivation layer, the polymer passivation layer also having apertures through which the first metallization layer and the dielectric passivation layer may be accessed. A second metallization layer is then formed on the polymer passivation layer to which at least one electronic component is connected. In specific embodiments, the polymer passivation layer includes polyimide.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.