Serpentine cross-section piezoelectric linear actuator

US6107726A · kind A · utility

Assignee

• Materials Systems, Inc. · US

Inventors

• Craig D. Near · Acton, US
• Brian G. Pazol · Marlborough, US
• Leslie J. Bowen · Concord, US

Key dates

• Filing date: Mar 11, 1998
• Grant date: Aug 22, 2000
• Expiry date: Mar 11, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/206

Abstract

A serpentine cross-section piezoelectric linear actuator includes a unitary, densified, rigid, monolithic piezoelectric or electrostrictive ceramic body, the body including a top, four sides generally normal to and interconnected with the top, a base generally normal to and interconnected with the sides, and two or more ceramic layers including a top ceramic layer providing the top, a bottom ceramic layer providing the bottom, and, optionally, one or more intermediate ceramic layers, the layers being disposed parallel to and superimposed over one another. Each ceramic layer except the top ceramic layer is joined at a first side to one of the ceramic layers adjacent thereto by a first ceramic bridge and each ceramic layer except the bottom ceramic layer is joined at a second side opposite the first side to another of the ceramic layers adjacent thereto by a second ceramic bridge. First and second cavities extend into the ceramic body from the first and second sides, respectively, the first cavities alternating with the second cavities in the ceramic body, so that the ceramic body has a serpentine cross-section. The body further includes a first electrode and a second electrode, each…