Test apparatus for time dependent dielectric breakdown
US6107816A · kind A · utility
2Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1997 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Apr 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/1263
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test structure and test fixture which are capable of measuring time dependent dielectric breakdown under accelerated temperature test conditions which can extend to 300.degree. C. The test structure is a parallel plate configuration with metal electrodes which is insensitive to polarity. The test fixture employs a ceramic or polymide body which remains rigid and well isolated electrically under these test conditions
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.