Device for re-directing light from optical waveguide
US6108472A · kind A · utility
58Cited by
14References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 1998 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Feb 6, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The device is formed on a silicon-on-insulator chip (which comprises a layer of silicon (1) separated from a substrate (3) by an insulator layer (2)) and comprises an integrated waveguide (4) formed in the silicon layer (1) and a reflective facet (6) formed in a recess in the silicon layer (1). The facet (6) is positioned to redirect light in a desired direction. The waveguide (4) and facet (6) are both formed in the silicon layer (1) so their positions can be defined by the same lithographic steps so they are automatically aligned with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.