Process gas supply unit
US6109303A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1999 |
| Grant date | Aug 29, 2000 |
| Priority date | — |
| Expiry date | Apr 22, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.