Temperature controlled chemical dispenser
US6110280A · kind A · utility
1Cited by
4References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 11, 1999 |
| Grant date | Aug 29, 2000 |
| Priority date | — |
| Expiry date | May 11, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is a temperature controlled dispense arm for dispensing chemicals in a spin coating machine. The temperature controlled dispense arm has a cooling portion containing cooling coils and a dispense arm base having chemical dispense passages. The temperature controlled dispense arm maintains the chemical dispense passages at a cooled temperature as determined by the cooling coils located in the cooling portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.