Method of manufacturing a composite material

US6110329A · kind A · utility

Assignee

• Forschungszentrum Karlsruhe GmbH · DE

Inventors

• Helmut Holleck · Karlsruhe, DE
• Michael Stüber · Karlsruhe, DE

Key dates

• Filing date: Dec 18, 1998
• Grant date: Aug 29, 2000
• Expiry date: Dec 18, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/027
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a method of manufacturing a composite material structure consisting of a substrate with a layer of essentially pure sp.sup.2 - and sp.sup.3 -hybridized carbon with a sp.sup.3 -hybridized carbon proportion which increases toward the surface of the carbon layer, the carbon layer is deposited on the substrate by a PVD process using a magnetron sputtering apparatus in a process chamber in which an argon partial pressure of 0.6 to 1.0 pa is maintained and, during the carbon deposition, a bias voltage is maintained which is increased with increasing thickness of the layer from 0 to 300 volts.