Acceleration sensor and method for producing the same
US6111338A · kind A · utility
29Cited by
16References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1997 |
| Grant date | Aug 29, 2000 |
| Priority date | — |
| Expiry date | Jan 13, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/176
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acceleration sensor includes: a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via the conductive protrusions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.