Multilayer absorbing antireflective coating
US6111698A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 1999 |
| Grant date | Aug 29, 2000 |
| Priority date | — |
| Expiry date | Mar 4, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/116
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflection control member includes a multilayer stack that is adhered to a substrate using a primer layer to promote adhesion. The multilayer stack includes pairs of layers in which the first layer is a grey metal and the second layer is a substantially transparent material. In the preferred embodiment, the grey metal is nickel chromium and the transparent layer is a silicon oxide. For each pair of layers, the grey metal is nearer to the surface of the substrate for which antireflection is a concern. The primer layer has a thickness of less than 50 angstroms. Although the primer layer is deposited in an essentially oxygen-free environment, it may oxidize following deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.