Workpiece vibration damper
US6113056A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 4, 1998 |
| Grant date | Sep 5, 2000 |
| Priority date | — |
| Expiry date | Aug 4, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6875
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides an apparatus for supporting a workpiece in a precision processing system. The apparatus includes a plurality of workpiece contact elements for supporting the workpiece substantially in a plane, and a compliant stiction support for reducing workpiece vibration. The workpiece supporting apparatus can include a base member connected to the workpiece contact elements and to the compliant stiction support. The complaint stiction support can include a slider assembly for contacting the workpiece. The slider assembly is in sliding, frictional connection with the base member. The compliant stiction support can further include a workpiece contact spring element for forcing the slider assembly into contact with the workpiece. The compliant stiction support can further include a stiction spring element. The stiction spring element is in contact with the slider element. The stiction spring element forces the slider element into frictional contact with the base member. Thus, the compliant stiction support stiffly supports the workpiece against vibrational forces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.