Split-beam laser apparatus for making a nozzle member
US6114654A · kind A · utility
6Cited by
8References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 5, 1999 |
| Grant date | Sep 5, 2000 |
| Priority date | — |
| Expiry date | May 5, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A work apparatus for manufacturing a nozzle member by a method including the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with the corresponding split illumination beams so as to expose at least a single workpiece via the mask patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.