Apparatus for and method of evaluating the polarization characteristic of a ferroelectric capacitor
US6114861A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 11, 1998 |
| Grant date | Sep 5, 2000 |
| Priority date | — |
| Expiry date | Mar 11, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C11/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Described herein is an apparatus for evaluating the polarization characteristic of a ferroelectric capacitor. The apparatus includes a ferroelectric capacitor, a first pulse generator, a second pulse generator, a reference capacitor of a known capacitance value, and switch means. Those electronic circuit elements and components are all fabricated into a semiconductor substrate. In the apparatus, the first and second electrodes of the ferroelectric capacitor are connected to the output terminals of the first and second pulse generators. A second electrode of the ferroelectric capacitor is connected to an output terminal of the second pulse generator. The second electrode of the ferroelectric capacitor is connected to a first electrode of the reference capacitor through the switch means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.