Method of making synthetic silica glass
US6116055A · kind A · utility
17Cited by
5References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1998 |
| Grant date | Sep 12, 2000 |
| Priority date | — |
| Expiry date | Nov 13, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2201/20
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Disclosed is a synthetic silica-glass fabricating method in which the doping of chlorine into silica glass made by using a flame hydrolysis or thermal oxidation is increased. The process comprises the steps of producing a porous deposit of silica-glass particles through treatment of gaseous silicon compounds by the flame hydrolysis or the thermal oxidation process; and consolidating the porous deposit by a heat treatment in an atmosphere including an inert gas and silicon tetrachloride (SiCl.sub.4) gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.