Fluid control device

US6116283A · kind A · utility

Assignee

• FUJIKIN INCORPORATED · JP

Inventors

• Michio Yamaji · Osaka, JP
• Toshiro Nariai · Osaka, JP
• Hiroshi Morokoshi · Moriyama, JP

Key dates

• Filing date: Jul 8, 1999
• Grant date: Sep 12, 2000
• Expiry date: Jul 8, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/87885
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.