Field emission cathode manufacturing method
US6116975A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 1999 |
| Grant date | Sep 12, 2000 |
| Priority date | — |
| Expiry date | Apr 29, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission cathode manufacturing method is provided which comprise the steps of forming a cathode electrode on a substrate; forming an insulative layer and gate electrode, each having fine holes formed therein, in this order on the cathode electrode; thereafter immersing them in a solution in which particles of an electron-emitting substance is dispersed; and electrically depositing particles of the electron emission substance on the cathode electrode facing the fine holes by an electrophoresis using the cathode electrode as a positive or negative electrode, thereby forming an electron emitter. The wet method is adopted to form the field emission cathode, which permits to considerably reduce the plant and equipment investment and manufacture even a large-screen FED with an improved yield. Also, since the electron missive substance particles are fully exposed, a very low accuracy is allowed in producing the electron emitter. Therefore, the field emission cathode manufacturing method permits to produce a large-screen cathode plate of which the electron emission characteristic will not be deteriorated, with a greater ease and an improved yield.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.