Polybenzoxazole and polybenzothiazole precursors

US6120970A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Recai Sezi · Simmerath, DE
• Michael Keitmann · Weisendorf, DE

Key dates

• Filing date: Sep 25, 1998
• Grant date: Sep 19, 2000
• Expiry date: Sep 25, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0233
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

The polybenzoxazole and polybenzothiazole precursors of the invention have the following partial structure: ##STR1## where: A.sup.1 to A.sup.7 are--independently of one another--H, F, CH.sub.3, CF.sub.3, OCH.sub.3, OCF.sub.3, CH.sub.2 CH.sub.3, CF.sub.2 CF.sub.3, OCH.sub.2 CH.sub.3 or OCF.sub.2 CF.sub.3 ; PA1 T is O or S, and m is 1; PA1 Z is a carbocyclic or heterocyclic aromatic radical.