Patent · US Expired

Force sensing probe for scanning probe microscopy

US6121611A · kind A · utility

567Cited by
11References
26Claims
0Family size

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Key dates

Filing dateMay 20, 1998
Grant dateSep 19, 2000
Priority date
Expiry dateMay 20, 2018

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/873
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Force sensing probes for use in scanning probe microscopes and a method for coating such probes with a film comprising a magnetostrictive material are provided. The probes may be magnetized by placing them in a magnetic field which can be oriented in any direction with respect to the probes. The magnetostrictive effect leads to a compression or expansion of the magnetic film, altering its length by the strength of the applied field. This in turn causes the probe, which in a preferred embodiment is in the form of a cantilever, and the applied magnetic film, to deflect or bend. The consequent motion of the probe is much greater than that obtained by direct application of a magnetic force and the effect is not sensitive to the direction of the applied field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.