Magnetic force microscopy probe with bar magnet tip
US6121771A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 31, 1998 |
| Grant date | Sep 19, 2000 |
| Priority date | — |
| Expiry date | Aug 31, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic force microscopy (MFM) probe has an elongated probe tip with a planar surface onto which a uniformly thick magnetic film is formed. The probe tip is formed by focused ion beam (FIB) machining in a manner that creates both the planar surface and a triangular end with the triangular vertex forming the tip apex. Because the magnetic film is formed on a planar surface and has a uniform thickness it has the structural shape of an ideal bar magnet, with the triangular tip apex concentrating the magnetic flux from the ideal bar magnet to a very small volume. The probe tip has a length-to-width ratio of approximately 8:1 or greater, which gives rise to strong magnetic shape anisotropy. This stabilizes the magnetization of the tip in the presence of external magnetic fields, including fields from the sample. The probe is formed by FIB machining either the pyramidal probe portion of a conventional atomic force microscopy (AFM) integrated single-crystal silicon cantilever and probe, or the generally conically shaped or needle-like tip of a conventional AFM probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.