Patent · US Expired

System for the measurement of acceleration in three axes

US6122965A · kind A · utility

36Cited by

7References

9Claims

0Family size

Assignees

Temic Telefunken Microelectronik · DE
Daimlerchrysler AG · US

Inventors

Helmut Seidel · Starnberg, DE
Josef Schalk · Riedlingen, DE
Ulrich Prechtel · Munich, DE

Key dates

Filing date	Dec 1, 1997
Grant date	Sep 26, 2000
Priority date	—
Expiry date	Dec 1, 2017

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0845
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system for measuring acceleration in three axes comprises four individual sensors arranged in a rectangle on a common substrate with each having one main sensitivity axis. Each individual sensor has a seismic mass in the form of a cantilevered paddle connected by a bending beam to an outer frame and having a center of gravity. Each beam is arranged parallel to the substrate surface and each contains means for measuring the bending that occurs when acceleration forces act upon the system. The actual acceleration occurring on each axis can then be determined as a function of the error angle formed between the sensitivity axis and the normal to the substrate surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.