Electrostatic capacity-type pressure sensor with reduced variation in reference capacitance
US6122973A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 1998 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | May 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitance-type pressure sensor capable of reducing a variation in reference capacitance. The capacitance-type pressure sensor includes insulating spacer (3b) arranged between a main capacitive electrode (4) and a reference capacitive electrode (5) to couple a base substrate (1) and a diaphragm substrate (2) to each other. The insulating spacer (3b) is patterned so as to restrain a variation in distance between the reference capacitive electrode (5) and a counter electrode (10) arranged on the diaphragm substrate (2). Such construction reduces a variation in capacitance between the reference capacitive electrode (5) and the diaphragm electrode (10), to thereby increase accuracy at which a pressure is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.