Method of fabricating a membrane-actuated charge controlled mirror (CCM)
US6123985A · kind A · utility
97Cited by
59References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 28, 1998 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | Oct 28, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A membrane-actuated charge controlled mirror (CCM) that exhibits increased deflection range, reduced beam current and improved electrostatic stability is fabricated using a combination of flat panel manufacturing along with traditional MEMS techniques. More specifically, a unique combination of five masking layers is used to fabricate a number of CCMs on a large glass panel. At the completion of the MEMS processing, the glass panel is diced into individual CCMs. Thereafter, the polymer mirror and membrane release layers are simultaneously released through vent holes in the membrane to leave the free-standing CCM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.