Method for analyzing minute foreign substance elements
US6124142A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1996 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | Feb 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/953
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To provide a minute foreign matter analysis method and device wherein the observation, analysis and estimation of minute foreign matter is permitted by linking the device coordinate of a particle inspection device and those of other analysis devices with by far higher accuracy. A minute foreign matter analysis method comprising the steps of: determining the position of a minute foreign substance on the surface of a sample in a particle test unit; transferring said sample onto a coordinate stage of an analysis unit; inputting the position determined by said particle test unit for the minute foreign substance to the coordinate stage of the analysis unit; and analyzing the contents of the relevant minute foreign substance wherein at least one of the unit coordinate to be employed in said particle test unit and the unit coordinate to be employed in said analysis unit is previously corrected using a standard wafer which has a scale on the surface so that coordination systems of said particle test unit and said analysis unit can be linked each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.